<th id="5nh9l"></th><strike id="5nh9l"></strike><th id="5nh9l"><noframes id="5nh9l"><th id="5nh9l"></th><strike id="5nh9l"></strike>
<progress id="5nh9l"><noframes id="5nh9l"><th id="5nh9l"><noframes id="5nh9l">
<th id="5nh9l"></th> <strike id="5nh9l"><noframes id="5nh9l"><span id="5nh9l"></span>
<progress id="5nh9l"><noframes id="5nh9l"><span id="5nh9l"><noframes id="5nh9l"><span id="5nh9l"></span><strike id="5nh9l"><noframes id="5nh9l"><strike id="5nh9l"></strike>
<span id="5nh9l"><noframes id="5nh9l">
<span id="5nh9l"><noframes id="5nh9l">
<span id="5nh9l"></span><span id="5nh9l"><video id="5nh9l"></video></span>
<th id="5nh9l"><noframes id="5nh9l"><th id="5nh9l"></th>
<progress id="5nh9l"><noframes id="5nh9l">
Volume 13 Issue 6
Oct.  2021
Turn off MathJax
Article Contents
Lu: Fanxiu, Yang Jinqi, Yang Baoxiong, Ye Ruiceng. Microhardness of Magnetron Sputtered Diamond-like Thin Carbon Films[J]. Chinese Journal of Engineering, 1991, 13(6): 548-553. doi: 10.13374/j.issn1001-053x.1991.06.025
Citation: Lu: Fanxiu, Yang Jinqi, Yang Baoxiong, Ye Ruiceng. Microhardness of Magnetron Sputtered Diamond-like Thin Carbon Films[J]. Chinese Journal of Engineering, 1991, 13(6): 548-553. doi: 10.13374/j.issn1001-053x.1991.06.025

Microhardness of Magnetron Sputtered Diamond-like Thin Carbon Films

doi: 10.13374/j.issn1001-053x.1991.06.025
  • Received Date: 1990-10-04
    Available Online: 2021-10-26
  • Conventional microhardness test were employed to characterize the mechanical properties of magnetron sputtered diamond-like carbon thin films of thickness of 0.09-0.56 mirons. It was found that microhardness of magnetron sputtered DLC varies with sputtering parameters in a systematic way and it can be related to the diamond-like properties and the component of SP2 and SP3 structures of the DLC. Analysis from DLC of 0.3073μm which were simu-taneously sputtered onto stainless steel and single crystal silicon substrate at 200W showed that the true hardness of the DLC was ranging between HV 6000-6600, which is close to the hardness of natural diamond. Pronounced indentation size effect (ISE) was observed, and the ISE index of 1.9 for the DLC was obluined.

     

  • loading
  • 加載中

Catalog

    通訊作者: 陳斌, bchen63@163.com
    • 1. 

      沈陽化工大學材料科學與工程學院 沈陽 110142

    1. 本站搜索
    2. 百度學術搜索
    3. 萬方數據庫搜索
    4. CNKI搜索
    Article views (203) PDF downloads(7) Cited by()
    Proportional views
    Related

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return
    <th id="5nh9l"></th><strike id="5nh9l"></strike><th id="5nh9l"><noframes id="5nh9l"><th id="5nh9l"></th><strike id="5nh9l"></strike>
    <progress id="5nh9l"><noframes id="5nh9l"><th id="5nh9l"><noframes id="5nh9l">
    <th id="5nh9l"></th> <strike id="5nh9l"><noframes id="5nh9l"><span id="5nh9l"></span>
    <progress id="5nh9l"><noframes id="5nh9l"><span id="5nh9l"><noframes id="5nh9l"><span id="5nh9l"></span><strike id="5nh9l"><noframes id="5nh9l"><strike id="5nh9l"></strike>
    <span id="5nh9l"><noframes id="5nh9l">
    <span id="5nh9l"><noframes id="5nh9l">
    <span id="5nh9l"></span><span id="5nh9l"><video id="5nh9l"></video></span>
    <th id="5nh9l"><noframes id="5nh9l"><th id="5nh9l"></th>
    <progress id="5nh9l"><noframes id="5nh9l">
    259luxu-164