Studg of Tantalum Coating on Steel by Chemical Vapour Deposition

Lu Yanping; Zhang Zhangxin; Zhao Haibin; Han Wenli

doi:10.13374/j.issn1001-053x.1984.02.011

Volume 6 Issue 2

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Lu Yanping, Zhang Zhangxin, Zhao Haibin, Han Wenli. Studg of Tantalum Coating on Steel by Chemical Vapour Deposition[J]. Chinese Journal of Engineering, 1984, 6(2): 118-124. doi: 10.13374/j.issn1001-053x.1984.02.011

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Lu Yanping, Zhang Zhangxin, Zhao Haibin, Han Wenli. Studg of Tantalum Coating on Steel by Chemical Vapour Deposition[J]. Chinese Journal of Engineering, 1984, 6(2): 118-124. doi: 10.13374/j.issn1001-053x.1984.02.011

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Studg of Tantalum Coating on Steel by Chemical Vapour Deposition

doi: 10.13374/j.issn1001-053x.1984.02.011

Available Online: 2021-11-08

Abstract

Abstract

A tantalum coating process on 45 steel by chemical vapour deposition was studied in the Ta-Cl₂-H₂ system.Deposit rate of tantalum associated with temperature and partial pressure of TaCl₅ and H₂ was investigeted.Coating stru-ctures examined by metallogaphy,x-ray diffraction and electroprobe analysis methods ware also described.Corrosion experimental results in 37.7% HCl and 63% H₂SO₄ Solution show that corrosion rate of the coated samples is 2-3 ord ers lower then that of uncoated samples.