高熵合金與非晶合金柔性材料

黃浩; 張勇

doi:10.13374/j.issn2095-9389.2020.08.31.003

高熵合金與非晶合金柔性材料

doi: 10.13374/j.issn2095-9389.2020.08.31.003

黃浩¹,
張勇^{1, 2, 3, ,}

1.
北京科技大學新金屬材料國家重點實驗室，北京 100083
2.
青海大學青海省高性能輕金屬合金及深加工工程技術研究中心，青海省新型輕合金重點實驗室，西寧 810016
3.
北京科技大學順德研究生院，佛山 528399

基金項目: 區域聯合基金資助項目（2019B1515120020）

詳細信息

通訊作者:
E-mail：drzhangy@ustb.edu.cn

中圖分類號: TG139
計量
- 文章訪問數: 2070
- HTML全文瀏覽量: 1119
- PDF下載量: 158
- 被引次數: 0
出版歷程
- 收稿日期: 2020-08-31
- 刊出日期: 2021-01-25

High-entropy alloy and metallic glass flexible materials

HAUNG Hao¹,
ZHANG Yong^{1, 2, 3
, ,}

1.
State Key Laboratory for Advanced Metals and Materials, University of Science and Technology Beijing, Beijing 100083, China
2.
Qinghai Provincial Key Laboratory of New Light Alloys, Qinghai Provincial Engineering Research Center of High Performance Light Metal Alloys and Forming, Qinghai University, Xining 810016, China
3.
Shunde Graduate School, University of Science and Technology Beijing, Foshan 528399, China

More Information

Corresponding author: E-mail: drzhangy@ustb.edu.cn

摘要

摘要: 高熵合金與非晶合金作為新一代金屬材料，具備許多優異的物理、化學及力學性能，在柔性電子領域展現出巨大的應用潛力。傳統的塊體高熵合金與非晶合金雖然性能優異，但由于材料本身的剛性特點無法滿足可變形電子設備的柔性需求，因此需要通過一定方式如降低維度、設計微結構等賦予其柔性特征。在簡述高熵合金柔性纖維的力學性能特點的基礎上，介紹了高熵合金薄膜作為潛在柔性材料的制備方式與結構性能特點，總結了非晶合金薄膜應用于電子皮膚、柔性電極、微結構制作等柔性電子領域中的最新進展，最后討論了現有工作的不足之處并對未來柔性電子的發展前景進行了展望。
- 高熵合金纖維 /
- 高熵合金薄膜 /
- 非晶合金 /
- 柔性材料 /
- 柔性電子學
Abstract: In recent years, smart watches and folding-screen phones have become increasingly popular in the electronic market. This trend signifies that consumers nowadays not only pursue high performance of electronic devices but also demand higher comfort from electronic devices. With the improvement of material properties and progress in microelectronics technology, flexible materials and electronic devices have developed rapidly in recent years, forming a research hotspot in the electronics industry. Flexible electronic devices can achieve different deformation states owing to their small size, deformability, and portability. Unlike traditional electronic devices integrated with rigid materials such as silicon, flexible electronic devices can also undergo various mechanical deformations such as stretching, torsion, bending, and folding during usage, which meets the people's requirements for portable, lightweight, and deformable electronic devices. The unique characteristics of flexible electronic devices and materials will promote the innovative development of electronic skin, smart robots, artificial prostheses, implantable medical diagnosis, flexible displays, and the Internet of Things, which will eventually result in tremendous changes in our daily lives. As a new generation of metal materials, high-entropy alloys and metallic glasses have exhibited excellent physical, chemical, and mechanical properties owing to their unique structural characteristics, which show great potential in flexible electronics applications. However, the rigidity of the material itself cannot meet the requirements of deformable electronic devices. Therefore, it is necessary to realize the desired flexibility in these materials by reducing dimensions and designing microstructures. This paper briefly described the mechanical properties and preparation methods of high-entropy fibers and introduced the preparation methods, structural characteristics, and unique properties of high-entropy films as potential flexible materials. Applications of metallic glass in electronic skin, flexible electrodes, and microstructure designing were then summarized. Finally, the shortcomings of the existing work were discussed and the prospects for the development of flexible electronics in the future were presented.
- high-entropy fibers /
- high-entropy films /
- metallic glass /
- flexible materials /
- flexible electronics

HTML全文

圖 1 拉拔法制備纖維示意圖

Figure 1. Schematic of fiber preparation by drawing methods

下載: 全尺寸圖片幻燈片

圖 2 Al_0.3CoCrFeNi高熵合金纖維。（a）力學性能；（b）宏觀視圖^[17]

Figure 2. Al_0.3CoCrFeNi high-entropy alloy fibers: (a) tensile strength and ductility; (b) macroscopic views^[17]

下載: 全尺寸圖片幻燈片

圖 3 不同Nb含量Nb_xCoCrCuFeNi薄膜的XRD圖譜^[30]

Figure 3. XRD patterns of the Nb_xCoCrCuFeNi films with different Nb atomic percentages^[30]

下載: 全尺寸圖片幻燈片

圖 4 VNbMoTaW高熵合金薄膜在不同溫度氧化1 h后的表面形貌。（a）初始沉積狀態；（b）300 ℃；（c）500 ℃；（d）800 ℃^[37]

Figure 4. Surface micrographs of VNbMoTaW HEA films after oxidation at different temperatures for 1 h: (a) As-deposited; (b) 300 ℃; (c) 500 ℃; (d) 800 ℃^[37]

下載: 全尺寸圖片幻燈片

圖 5 Zr₅₅Cu₃₀Ni₅Al₁₀非晶合金電子皮膚。（a）監測手指彎曲；（b）電子皮膚照片^[43]

Figure 5. Zr₅₅Cu₃₀Ni₅Al₁₀ metallic-glass electronic skin: (a) monitor movements of bending of fingers; (b) image of the electronic skin^[43]

下載: 全尺寸圖片幻燈片

圖 6 熱貼片在打開/關閉時的紅外圖像^[50]

Figure 6. IR image of the heat patch with the switch turned on/off^[50]

下載: 全尺寸圖片幻燈片

圖 7 非晶合金的微結構設計。（a）非晶彈簧^[52]；（b）褶皺結構^[53]

Figure 7. Microstructure design of metallic glass: (a) wave springs^[52]; (b) wrinkle structure^[53]

下載: 全尺寸圖片幻燈片

圖 8 褶皺結構制備示意圖

Figure 8. Schematic of wrinkle structure fabrication

下載: 全尺寸圖片幻燈片

表 1 高熵合金纖維力學性能

Table 1. Mechanical properties of high-entropy alloy fiber

Composition	Diameter/mm	σ_s/MPa	σ_b/MPa	Fracture elongation/%	Preparation method	Reference
Al_0.3CoCrFeNi	1	1136	1207	7.9	Hot rotary forging + Hot drawing	[17]
CoCrFeNi	1	1100	1100	12.6	Hot forging + Cold drawing	[18]
CoCrNi	2	1100	1220	24.5	Hot rotary forging + Hot drawing	[19]
CoCrFeMnNi	2.5	1540	1710	10	Hot forging + CTCR	[20]
CoCrFeMnNi	8	1300	1300	6	Cold drawing	[21]
Co₁₀Cr₁₅Fe₂₅Mn₁₀Ni₃₀V₁₀	1	1600	1600	2.4	Cold drawing	[22]

下載: 導出CSV

259luxu-164

參考文獻(56)

[1]	Almuslem A S, Shaikh S F, Hussain M M. Flexible and stretchable electronics for harsh-environmental applications. Adv Mater Technol, 2019, 4(9): 1900145 doi: 10.1002/admt.201900145
[2]	Wang S H, Xu J, Wang W C, et al. Skin electronics from scalable fabrication of an intrinsically stretchable transistor array. Nature, 2018, 555(7694): 83 doi: 10.1038/nature25494
[3]	Quintero A V, Verplancke R, De Smet H, et al. Stretchable electronic platform for soft and smart contact lens applications. Adv Mater Technol, 2017, 2(8): 1700073 doi: 10.1002/admt.201700073
[4]	Cai L, Song L, Luan P S, et al. Super-stretchable, transparent carbon nanotube-based capacitive strain sensors for human motion detection. Sci Rep, 2013, 3: 3048 doi: 10.1038/srep03048
[5]	Jang H, Park Y J, Chen X, et al. Graphene-based flexible and stretchable electronics. Adv Mater, 2016, 28(22): 4184 doi: 10.1002/adma.201504245
[6]	Kumar D, Stoichkov V, Brousseau E, et al. High performing AgNW transparent conducting electrodes with a sheet resistance of 2.5?Ω Sq^?1 based upon a roll-to-roll compatible post-processing technique. Nanoscale, 2019, 11(12): 5760 doi: 10.1039/C8NR07974A
[7]	Fan X, Nie W Y, Tsai H, et al. PEDOT: PSS for flexible and stretchable electronics: modifications, strategies, and applications. Adv Sci, 2019, 6(19): 1900813 doi: 10.1002/advs.201900813
[8]	Yeh J W, Chen S K, Lin S J, et al. Nanostructured high-entropy alloys with multiple principal elements: novel alloy design concepts and outcomes. Adv Eng Mater, 2004, 6(5): 299 doi: 10.1002/adem.200300567
[9]	Cantor B, Chang I T H, Knight P, et al. Microstructural development in equiatomic multicomponent alloys. Mater Sci Eng A, 2004, 375-377: 213 doi: 10.1016/j.msea.2003.10.257
[10]	Zhang W R, Liaw P K, Zhang Y. Science and technology in high-entropy alloys. Sci China-Mater, 2018, 61(1): 2 doi: 10.1007/s40843-017-9195-8
[11]	Salishchev G A, Tikhonovsky M A, Shaysultanov D G, et al. Effect of Mn and V on structure and mechanical properties of high-entropy alloys based on CoCrFeNi system. J Alloys Compd, 2014, 591: 11 doi: 10.1016/j.jallcom.2013.12.210
[12]	Ma S G, Zhang S F, Qiao J W, et al. Superior high tensile elongation of a single-crystal CoCrFeNiAl_0.3 high-entropy alloy by Bridgman solidification. Intermetallics, 2014, 54: 104 doi: 10.1016/j.intermet.2014.05.018
[13]	Li D Y, Zhang Y. The ultrahigh charpy impact toughness of forged Al_xCoCrFeNi high entropy alloys at room and cryogenic temperatures. Intermetallics, 2016, 70: 24 doi: 10.1016/j.intermet.2015.11.002
[14]	Klement W, Willens R H, Duwez P. Non-crystalline structure in solidified gold–silicon alloys. Nature, 1960, 187(4740): 869
[15]	Hui X D, Lv K, Si J J, et al. Development of Fe-based amorphous and nanocrystalline alloys with high saturation flux density. Chin J Eng, 2018, 40(10): 1158 惠希東, 呂曠, 斯佳佳, 等. 高飽和磁化強度鐵基非晶納米晶軟磁合金發展概況. 工程科學學報, 2018, 40(10):1158
[16]	Tian L, Cheng Y Q, Shan Z W, et al. Approaching the ideal elastic limit of metallic glasses. Nat Commun, 2012, 3: 609 doi: 10.1038/ncomms1619
[17]	Li D Y, Li C X, Feng T, et al. High-entropy Al_0.3CoCrFeNi alloy fibers with high tensile strength and ductility at ambient and cryogenic temperatures. Acta Mater, 2017, 123: 285 doi: 10.1016/j.actamat.2016.10.038
[18]	Huo W Y, Fang F, Zhou H, et al. Remarkable strength of CoCrFeNi high-entropy alloy wires at cryogenic and elevated temperatures. Scripta Mater, 2017, 141: 125 doi: 10.1016/j.scriptamat.2017.08.006
[19]	Liu J P, Chen J X, Liu T W, et al. Superior strength-ductility CoCrNi medium-entropy alloy wire. Scripta Mater, 2020, 181: 19 doi: 10.1016/j.scriptamat.2020.02.002
[20]	Kwon Y J, Won J W, Park S H, et al. Ultrahigh-strength CoCrFeMnNi high-entropy alloy wire rod with excellent resistance to hydrogen embrittlement. Mater Sci Eng A, 2018, 732: 105 doi: 10.1016/j.msea.2018.06.086
[21]	Ma X G, Chen J, Wang X H, et al. Microstructure and mechanical properties of cold drawing CoCrFeMnNi high entropy alloy. J Alloys Compd, 2019, 795: 45 doi: 10.1016/j.jallcom.2019.04.296
[22]	Cho H S, Bae S J, Na Y S, et al. Influence of reduction ratio on the microstructural evolution and subsequent mechanical properties of cold-drawn Co₁₀Cr₁₅Fe₂₅Mn₁₀Ni₃₀V₁₀ high entropy alloy wires. J Alloys Compd, 2020, 821: 153526 doi: 10.1016/j.jallcom.2019.153526
[23]	Braeckman B R, Boydens F, Hidalgo H, et al. High entropy alloy thin films deposited by magnetron sputtering of powder targets. Thin Solid Films, 2015, 580: 71 doi: 10.1016/j.tsf.2015.02.070
[24]	Liao W B, Zhang H T, Liu Z Y, et al. High strength and deformation mechanisms of Al_0.3CoCrFeNi high-entropy alloy thin films fabricated by magnetron sputtering. Entropy, 2019, 21(2): 146 doi: 10.3390/e21020146
[25]	Zhang M N, Zhou X L, Yu X N, et al. Synthesis and characterization of refractory TiZrNbWMo high-entropy alloy coating by laser cladding. Surf Coat Technol, 2017, 311: 321 doi: 10.1016/j.surfcoat.2017.01.012
[26]	Yue T M, Xie H, Lin X, et al. Solidification behaviour in laser cladding of AlCoCrCuFeNi high-entropy alloy on magnesium substrates. J Alloys Compd, 2014, 587: 588 doi: 10.1016/j.jallcom.2013.10.254
[27]	Hsu W L, Yang Y C, Chen C Y, et al. Thermal sprayed high-entropy NiCo_0.6Fe_0.2Cr_1.5SiAlTi_0.2 coating with improved mechanical properties and oxidation resistance. Intermetallics, 2017, 89: 105 doi: 10.1016/j.intermet.2017.05.015
[28]	Soare V, Burada M, Constantin I, et al. Electrochemical deposition and microstructural characterization of AlCrFeMnNi and AlCrCuFeMnNi high entropy alloy thin films. Appl Surf Sci, 2015, 358: 533 doi: 10.1016/j.apsusc.2015.07.142
[29]	Xing Q W, Ma J, Wang C, et al. High-throughput screening solar-thermal conversion films in a pseudobinary (Cr, Fe, V)–(Ta, W) system. ACS Comb Sci, 2018, 20(11): 602 doi: 10.1021/acscombsci.8b00055
[30]	Braeckman B R, Depla D. Structure formation and properties of sputter deposited Nb_x?CoCrCuFeNi high entropy alloy thin films. J Alloys Compd, 2015, 646: 810 doi: 10.1016/j.jallcom.2015.06.097
[31]	Yan X H, Zhang Y. High-entropy films and compositional gradient materials. Surf Technol, 2019, 48(6): 98 閆薛卉, 張勇. 高熵薄膜和成分梯度材料. 表面技術, 2019, 48(6):98
[32]	Cai Y P, Wang G J, Ma Y J, et al. High hardness dual-phase high entropy alloy thin films produced by interface alloying. Scripta Mater, 2019, 162: 281 doi: 10.1016/j.scriptamat.2018.11.004
[33]	Fang S, Wang C, Li C L, et al. Microstructures and mechanical properties of CoCrFeMnNiV_x high entropy alloy films. J Alloys Compd, 2020, 820: 153388 doi: 10.1016/j.jallcom.2019.153388
[34]	Cui P P, Li W, Liu P, et al. Effects of nitrogen content on microstructures and mechanical properties of (AlCrTiZrHf)N high-entropy alloy nitride films. J Alloys Compd, 2020, 834: 155063 doi: 10.1016/j.jallcom.2020.155063
[35]	Ye Q F, Feng K, Li Z G, et al. Microstructure and corrosion properties of CrMnFeCoNi high entropy alloy coating. Appl Surf Sci, 2017, 396: 1420 doi: 10.1016/j.apsusc.2016.11.176
[36]	Qiu X W. Microstructure, hardness and corrosion resistance of Al₂CoCrCuFeNiTi_x high-entropy alloy coatings prepared by rapid solidification. J Alloys Compd, 2018, 735: 359 doi: 10.1016/j.jallcom.2017.11.158
[37]	Chen Y Y, Hung S B, Wang C J, et al. High temperature electrical properties and oxidation resistance of V?Nb?Mo?Ta?W high entropy alloy thin films. Surf Coat Technol, 2019, 375: 854 doi: 10.1016/j.surfcoat.2019.07.080
[38]	Feng X G, Tang G Z, Gu L, et al. Preparation and characterization of TaNbTiW multi-element alloy films. Appl Surf Sci, 2012, 261: 447 doi: 10.1016/j.apsusc.2012.08.030
[39]	Pu G, Lin L W, Ang R, et al. Outstanding radiation tolerance and mechanical behavior in ultra-fine nanocrystalline Al_1.5CoCrFeNi high entropy alloy films under He ion irradiation. Appl Surf Sci, 2020, 516: 146129 doi: 10.1016/j.apsusc.2020.146129
[40]	El-Atwani O, Li N, Li M, et al. Outstanding radiation resistance of tungsten-based high-entropy alloys. Sci Adv, 2019, 5(3): eaav2002 doi: 10.1126/sciadv.aav2002
[41]	Amjadi M, Kyung K U, Park I, et al. Stretchable, skin-mountable, and wearable strain sensors and their potential applications: a review. Adv Funct Mater, 2016, 26(11): 1678 doi: 10.1002/adfm.201504755
[42]	Yi J, Bai H Y, Zhao D Q, et al. Piezoresistance effect of metallic glassy fibers. Appl Phys Lett, 2011, 98(24): 241917 doi: 10.1063/1.3599843
[43]	Xian H J, Cao C R, Shi J A, et al. Flexible strain sensors with high performance based on metallic glass thin film. Appl Phys Lett, 2017, 111(12): 121906 doi: 10.1063/1.4993560
[44]	Jung M, Lee E, Kim D, et al. Amorphous FeZr metal for multi-functional sensor in electronic skin. npj Flexible Electron, 2019, 3: 8 doi: 10.1038/s41528-019-0051-7
[45]	Cho J S, Jang W, Park K H, et al. Metallic amorphous alloy for long-term stable electrodes in organic sensors and photovoltaics. Org Electron, 2020, 84: 105811 doi: 10.1016/j.orgel.2020.105811
[46]	Van Toan N, Tuoi T T K, Tsai Y C, et al. Micro-fabricated presure sensor using 50 nm-thick of Pd-based metallic glass freestanding membrane. Sci Rep, 2020, 10: 10108 doi: 10.1038/s41598-020-67150-y
[47]	Li S Q, Horikawa S, Park M K, et al. Amorphous metallic glass biosensors. Intermetallics, 2012, 30: 80 doi: 10.1016/j.intermet.2012.03.030
[48]	Betz U, Olsson M K, Marthy J, et al. Thin films engineering of indium tin oxide: large area flat panel displays application. Surf Coat Technol, 2006, 200(20-21): 5751 doi: 10.1016/j.surfcoat.2005.08.144
[49]	Lin H K, Chiu S M, Cho T P, et al. Improved bending fatigue behavior of flexible PET/ITO film with thin metallic glass interlayer. Mater Lett, 2013, 113: 182 doi: 10.1016/j.matlet.2013.09.084
[50]	Lee S, Kim S W, Ghidelli M, et al. Integration of transparent supercapacitors and electrodes using nanostructured metallic glass films for wirelessly rechargeable, skin heat patches. Nano Lett, 2020, 20(7): 4872 doi: 10.1021/acs.nanolett.0c00869
[51]	Qin C L, Zheng D H, Hu Q F, et al. Flexible integrated metallic glass-based sandwich electrodes for high-performance wearable all-solid-state supercapacitors. Appl Mater Today, 2020, 19: 100539 doi: 10.1016/j.apmt.2019.100539
[52]	Panagiotopoulos N T, Georgarakis K, Jorge Jr A M, et al. Advanced ultra-light multifunctional metallic-glass wave springs. Mater Des, 2020, 192: 108770 doi: 10.1016/j.matdes.2020.108770
[53]	Xian H J, Liu M, Wang X C, et al. Flexible and stretchable metallic glass micro-and nano-structures of tunable properties. Nanotechnology, 2018, 30(8): 085705
[54]	Khang D Y, Jiang H Q, Huang Y, et al. A stretchable form of single-crystal silicon for high-performance electronics on rubber substrates. Science, 2006, 311(5758): 208 doi: 10.1126/science.1121401
[55]	Tang J, Guo H, Zhao M M, et al. Highly stretchable electrodes on wrinkled polydimethylsiloxane substrates. Sci Rep, 2015, 5: 16527 doi: 10.1038/srep16527
[56]	Xu J S, Chen J, Zhang M, et al. Highly conductive stretchable electrodes prepared by in situ reduction of wavy graphene oxide films coated on elastic tapes. Adv Electron Mater, 2016, 2(6): 1600022 doi: 10.1002/aelm.201600022