基于ANSYS的新型聚合物石英壓電傳感器振動性能分析

王南飛; 李強; 谷宇

doi:10.13374/j.issn2095-9389.2017.02.019

基于ANSYS的新型聚合物石英壓電傳感器振動性能分析

doi: 10.13374/j.issn2095-9389.2017.02.019

北京科技大學自動化學院, 北京 100083

基金項目:

國家高新技術研究發展計劃資助項目（2013AA030901）

詳細信息

中圖分類號: TH89;TH-39
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出版歷程
- 收稿日期: 2016-04-14

Influence of polymer coating dimension variation on the resonant frequency of polymer quartz piezoelectric crystal sensors based on ANSYS

School of Automation and Electrical Engineering, University of Science and Technology Beijing, Beijing 100083, China

摘要

摘要: 新型聚合物石英壓電傳感器制備過程中，AT切型石英壓電傳感器基體的表面粗糙度及其基膜界面化學性質影響聚合物薄膜的生長，導致聚合物薄膜厚度不均勻、表面存在缺陷，使得傳感器采集的頻率信號不穩定.本文建立了新型聚合物石英壓電傳感器在考慮薄膜厚度不均、中心缺陷條件下的力學模型，利用ANSYS有限元軟件對其進行模態分析，得到復雜條件下傳感器振動特性.模態分析結果發現，傳感器固有頻率值隨聚合物薄膜缺陷的半徑值增大呈現出從穩定到發散的趨勢、隨薄膜的厚度值增大呈現出線性增大的趨勢.研究結果表明，新型聚合物石英壓電傳感器的生產應確保薄膜厚度均勻且嚴格控制中心缺陷半徑小于0.5 mm，該結果為制備穩定的新型聚合物石英壓電傳感器提供了重要依據.
- 壓電晶體 /
- 傳感器 /
- 諧振頻率 /
- 薄膜厚度 /
- 模態分析
Abstract: In the preparation process of novel polymer quartz piezoelectric sensors using AT-cut quartz substrates and polymer materials, the roughness and the chemical characteristics of the substrate surface have a great influence on the production of the sensors. It could result in thickness-varied or defective films of the sensors, which make the sensor's frequency signals unstable. In this paper, a mechanical model of the sensor is presented, which takes into account the conditions that the film is thickness-varied and defective. The ANSYS software was used to obtain the vibration characteristics of the mechanical model under complex conditions by modal analysis. Results show that the natural frequency values of the sensor change from a stable state to a divergence state with the increase of the film defect in the radius, and the natural frequency values of the sensor increase linearly with increase of the thickness for the film. It indicates that the thickness of the film should be kept uniform and the defect radius should be limited within 0.5 mm during producing the sensors. The results provide an important basis for producing the qualified polymer quartz piezoelectric sensors.
- piezoelectric crystals /
- sensors /
- resonant frequency /
- coating thickness /
- modal analysis

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參考文獻(13)

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