Experiment research and numerical simulation of thermal process in a suspended bed for Si3N4 synthesis
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摘要: 針對基于流態化技術利用硅粉直接氮化合成氮化硅粉的新工藝,建立了懸浮床內熱過程的二維數學模型,并借助CFD商業軟件FLUENT對懸浮床內熱過程進行了數值模擬,分析了氮氣速度、粉氣比和氮化溫度等因素對溫度場和硅轉化率的影響.結果表明,模擬計算值與實驗值誤差小于5%,該模型可以用來預測懸浮床內的熱過程.在本文條件下,當以平均粒徑2.7μm的硅粉為原料、氮化溫度為1 380℃、氮化時間為54.5 s時,硅的轉化率為22.5%.模型預測表明,如果將氮化溫度升至1 450℃、氮化時間延長至7.1 min,那么硅轉化率可達98.6%,氮化硅純度達98%以上.Abstract: Aiming to a method for the synthesis of silicon nitride powder by direct nitridation process based on fluidization technology, a two-dimensional mathematical model of thermal process in a suspended bed was established, the thermal process was simulated based on the commercial CFD software FLUENT, and the effects of the flow velocity of nitrogen gas, the ratio of particle to gas and nitridation temperature on the temperature of the bed and the conversion rate of silicon were analyzed. The results show that the errors between simulation and experimental values are less than 5% and the model can be used to predict the thermal process in the suspended bed. Under the experimental conditions in this study, when the silicon powder with a particle size of 2.7 μm is used as raw materials, with a nitridation temperature of 1380℃ and nitridation time of 54.5 s, the conversion rate of silicon is 22.5%. Theoretical predictions suggest that if the nitridation temperature is increased to 1450℃ and the nitridation time is extended to 7.1 min, the conversion rate of silicon and the purity of silicon nitride should reach 98.6% and 98%, respectively.
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Key words:
- silicon nitride /
- suspended bed /
- thermal process /
- mathematical model /
- numerical simulation
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