Ta種子層厚度及濺射速率對Ta/Ni<sub>65</sub>Co<sub>35</sub>雙層膜各向異性磁電阻和矯頑力的影響

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Ta種子層厚度及濺射速率對Ta/Ni₆₅Co₃₅雙層膜各向異性磁電阻和矯頑力的影響

張輝, 滕蛟, 馬紀東, 于廣華, 胡強

文章導航 > 工程科學學報 > 2005 > 27(4): 458-461

張輝, 滕蛟, 馬紀東, 于廣華, 胡強. Ta種子層厚度及濺射速率對Ta/Ni65Co35雙層膜各向異性磁電阻和矯頑力的影響[J]. 工程科學學報, 2005, 27(4): 458-461. doi: 10.13374/j.issn1001-053x.2005.04.017

引用本文:

張輝, 滕蛟, 馬紀東, 于廣華, 胡強. Ta種子層厚度及濺射速率對Ta/Ni₆₅Co₃₅雙層膜各向異性磁電阻和矯頑力的影響[J]. 工程科學學報, 2005, 27(4): 458-461. doi: 10.13374/j.issn1001-053x.2005.04.017

ZHANG Hui, TENG Jiao, MA Jidong, YU Guanghua, HU Qiang. Effects of the thickness and deposition rate of Ta seed layer on the anisotropic mag-netoresistance and coercivity of Ta/Ni65Co35 bilayers[J]. Chinese Journal of Engineering, 2005, 27(4): 458-461. doi: 10.13374/j.issn1001-053x.2005.04.017

Citation:

ZHANG Hui, TENG Jiao, MA Jidong, YU Guanghua, HU Qiang. Effects of the thickness and deposition rate of Ta seed layer on the anisotropic mag-netoresistance and coercivity of Ta/Ni₆₅Co₃₅ bilayers[J]. Chinese Journal of Engineering, 2005, 27(4): 458-461. doi: 10.13374/j.issn1001-053x.2005.04.017

張輝, 滕蛟, 馬紀東, 于廣華, 胡強. Ta種子層厚度及濺射速率對Ta/Ni65Co35雙層膜各向異性磁電阻和矯頑力的影響[J]. 工程科學學報, 2005, 27(4): 458-461. doi: 10.13374/j.issn1001-053x.2005.04.017

引用本文:

張輝, 滕蛟, 馬紀東, 于廣華, 胡強. Ta種子層厚度及濺射速率對Ta/Ni₆₅Co₃₅雙層膜各向異性磁電阻和矯頑力的影響[J]. 工程科學學報, 2005, 27(4): 458-461. doi: 10.13374/j.issn1001-053x.2005.04.017

ZHANG Hui, TENG Jiao, MA Jidong, YU Guanghua, HU Qiang. Effects of the thickness and deposition rate of Ta seed layer on the anisotropic mag-netoresistance and coercivity of Ta/Ni65Co35 bilayers[J]. Chinese Journal of Engineering, 2005, 27(4): 458-461. doi: 10.13374/j.issn1001-053x.2005.04.017

Citation:

ZHANG Hui, TENG Jiao, MA Jidong, YU Guanghua, HU Qiang. Effects of the thickness and deposition rate of Ta seed layer on the anisotropic mag-netoresistance and coercivity of Ta/Ni₆₅Co₃₅ bilayers[J]. Chinese Journal of Engineering, 2005, 27(4): 458-461. doi: 10.13374/j.issn1001-053x.2005.04.017

Ta種子層厚度及濺射速率對Ta/Ni₆₅Co₃₅雙層膜各向異性磁電阻和矯頑力的影響

doi: 10.13374/j.issn1001-053x.2005.04.017

張輝^1,2,
滕蛟^1,2,
馬紀東¹,
于廣華¹,
胡強¹

1. 北京科技大學材料科學與工程學院, 北京 100083;
2. 中國科學院物理研究所, 北京 100080

基金項目:

國家自然科學基金資助項目(No.50271007),教育部博士點基金(No.20030008003)及教育部科學技術研究重點項目(No.104023)

作者簡介:
張輝(1978-),男,博士研究生

中圖分類號: TM271
計量
- 文章訪問數: 178
- HTML全文瀏覽量: 53
- PDF下載量: 8
- 被引次數: 0
出版歷程
- 收稿日期: 2004-05-10
- 修回日期: 2005-09-10
- 網絡出版日期: 2021-08-17

Effects of the thickness and deposition rate of Ta seed layer on the anisotropic mag-netoresistance and coercivity of Ta/Ni₆₅Co₃₅ bilayers

1. Materials Science and Engineering School, University of Science and Technology Beijing, Beijing 100083, China;
2. Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China

摘要: 研究了Ta種子層的厚度、濺射速率對Ta/Ni₆₅Co₃₅雙層膜各向異性磁電阻值(△ρ/ρ)、矯頑力和織構的影響.研究表明,適當的Ta層厚度和較高的Ta層濺射速率對提高Ta/Ni₆₅Co₃₅雙層膜的△ρ/ρ是有效的.Ta種子層的使用增大了Ta/Ni₆₅Co₃₅雙層膜的矯頑力而其濺射速率對Ta/Ni₆₅Co₃₅雙層膜矯頑力的影響很小.
- Ta種子層 /
- 濺射速率 /
- 各相異性磁電阻 /
- 矯頑力 /
- (111)織構
Abstract: The effects of the thickness and deposition rate of Ta seed layer on the anisotropic magnetoresistance (AMP.) and coercivity ofTa/Ni₆₅Co₃₅ bilayers were investigated. The results showed that △ρ/ρ of Ta/Ni₆₅Co₃₅ bilayers could be improved at a certain thickness or higher deposition rate. The coercivity of Ta/Ni₆₅Co₃₅ films increased with the use of Ta seed layer. But the effect of the deposition rate on the coercivity of Ta/Ni₆₅Co₃₅ films was not significant.
- Ta seed layer /
- deposition rate /
- anisotropic magnetoresistance /
- coercivity /
- (111) texture

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