Abstract: The micro-process of cube texture formation in high purity electronic aluminum foils was investigated by EBSD (Electron Back Scattering Diffraction) technique in StM and the related analysis of crystal orientation. The nucleation and growth behavior of cube orientation grains in the early stage of recrystallization were discussed and analyzed during the annealing of cold rolled aluminum foils. The results show that the nuclei of cube orientation {001}<100> are not frequently observed in the rolled matrix, however, high purity aluminum foils hold strong cube texture after recrystallization. Cube texture formation abides by the mechanism of preferred growth, and the nuclei of cube orientation frequently form in the deformed matrix with S orientation grains {123}<634>.