CVD金剛石膜中的缺陷

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CVD金剛石膜中的缺陷

張恒大, 劉敬明, 宋建華, 呂反修, 唐偉忠

文章導航 > 工程科學學報 > 2002 > 24(4): 426-428

張恒大, 劉敬明, 宋建華, 呂反修, 唐偉忠. CVD金剛石膜中的缺陷[J]. 工程科學學報, 2002, 24(4): 426-428. doi: 10.13374/j.issn1001-053x.2002.04.011

引用本文:

張恒大, 劉敬明, 宋建華, 呂反修, 唐偉忠. CVD金剛石膜中的缺陷[J]. 工程科學學報, 2002, 24(4): 426-428. doi: 10.13374/j.issn1001-053x.2002.04.011

ZHANG Hengda, LIU Jingming, SONG Jianhua, LU: Fanxiu, TANG Weizhong. Defects in CVD Diamond Films[J]. Chinese Journal of Engineering, 2002, 24(4): 426-428. doi: 10.13374/j.issn1001-053x.2002.04.011

Citation:

ZHANG Hengda, LIU Jingming, SONG Jianhua, LU: Fanxiu, TANG Weizhong. Defects in CVD Diamond Films[J]. Chinese Journal of Engineering, 2002, 24(4): 426-428. doi: 10.13374/j.issn1001-053x.2002.04.011

張恒大, 劉敬明, 宋建華, 呂反修, 唐偉忠. CVD金剛石膜中的缺陷[J]. 工程科學學報, 2002, 24(4): 426-428. doi: 10.13374/j.issn1001-053x.2002.04.011

引用本文:

張恒大, 劉敬明, 宋建華, 呂反修, 唐偉忠. CVD金剛石膜中的缺陷[J]. 工程科學學報, 2002, 24(4): 426-428. doi: 10.13374/j.issn1001-053x.2002.04.011

ZHANG Hengda, LIU Jingming, SONG Jianhua, LU: Fanxiu, TANG Weizhong. Defects in CVD Diamond Films[J]. Chinese Journal of Engineering, 2002, 24(4): 426-428. doi: 10.13374/j.issn1001-053x.2002.04.011

Citation:

ZHANG Hengda, LIU Jingming, SONG Jianhua, LU: Fanxiu, TANG Weizhong. Defects in CVD Diamond Films[J]. Chinese Journal of Engineering, 2002, 24(4): 426-428. doi: 10.13374/j.issn1001-053x.2002.04.011

CVD金剛石膜中的缺陷

doi: 10.13374/j.issn1001-053x.2002.04.011

北京科技大學材料科學與工程學院, 北京 100083

基金項目:

國家高技術研究與發展計劃新材料領域“九五”重大項目(No.863-715-Z38-03)

作者簡介:
張恒大男,31歲,博士

中圖分類號: TB43
計量
- 文章訪問數: 161
- HTML全文瀏覽量: 17
- PDF下載量: 7
- 被引次數: 0
出版歷程
- 收稿日期: 2001-03-22
- 網絡出版日期: 2021-08-26

Defects in CVD Diamond Films

Material Science and Engineering School, UST Beijing, Beijing 100083, China

摘要: 研究了利用直流電弧等離子體噴射（DC Arc Plasma Jet）的制備的大面積金剛石膜中的缺陷問題.研究表明:金剛石膜中的缺陷包括表面缺陷、晶內缺陷和晶界缺陷,以及由于內應力產生的金剛石膜宏觀和微觀裂紋.金剛石膜中的缺陷與制備工藝參數有著密切關系.
- 金剛石膜 /
- 缺陷 /
- 成因 /
- 等離子體噴射
Abstract: The defects in large area diamond films prepared by DC arc plasma jet CVD method are researched. The defects in diamond films are investigated, including the surface, bulk, boundry defects and the macro-cracks and micro-cracks caused by internal stresses. The results show that the growth parameters often led to defects in diamond films.
- diamond films /
- defects /
- formation mechanism /

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