A Instrument on Surface Roughness Measurement with Laser Scanning
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摘要: 介紹激光掃描粗糙度測量儀的測量原理、結構及結果。本測量儀根據激光在工件表面的反射散射原理,應用激光掃描技術、數據采集、A/D轉換和定標曲線的計算機擬合,整個測量過程在單板機控制下自動完成。測量粗糙度Ra的分辨率為0.001μm,測量重復精度為0.006μm。Abstract: By employing the principle of laser reflecting scattering from the surface of the work piece and the laser scanning technique allied with compu-tered data collection, A/D transition and calibration curve fitting, the instrument can measure the surface roughness automatically. The resolution and repro-ducibility of the roughness measurement are 0.001μm and 0.006μm respectively.
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Key words:
- laser /
- scanning /
- roughness /
- measurement
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