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聚二硫二丙烷磺酸鈉在二元絡合化學鍍銅體系中的作用

Effect of sodium 3,3'-dithiodipropane sulfonate in a dual-ligand electroless copper system

  • 摘要: 用電化學方法研究添加劑聚二硫二丙烷磺酸鈉(SPS)對乙二胺四乙酸(EDTA)/四羥丙基乙二胺(THPED)二元絡合化學鍍銅過程的影響,測量體系的混合電位-時間關系,加入SPS后混合電位負移,負移過程較平緩,無突躍現象;采用線性掃描伏安法研究體系,表明SPS促進了陰陽兩極的極化,但主要是影響甲醛氧化的陽極極化過程.SPS也因此一定程度上提高了過程的沉積速率.通過掃描電鏡、能譜儀和X射線衍射儀對結構的分析,鍍層銅純凈度較高,無氧化銅等夾雜,鍍層細致平滑,發現SPS有促進(200)晶面擇優取向的作用.

     

    Abstract: The process of electroless copper plating in an EDTA/THPED dual-ligand system using sodium 3,3'-dithiodipropane sulfonate (SPS) as an additive was studied by the electrochemical method. The mixed potential of the system was measured as a function of time, and results indicate that addition of SPS gradually shifts the mixed potential toward the negative direction without saltation. The dual-ligand electroless copper system was then tested by linear sweep voltammetry, and SPS is found to accelerate both cathodic and anodic polarization. The additive mainly influences the anodic polarization of the formaldehyde oxidation process and the rate of copper deposition is improved to a certain extent. The surface morphology and texture of the resulting plated copper were also analyzed by scanning electron microscope, energy dispersive spectrometer and X-ray diffraction, and a high-purity product without Cu2O inclusions is confirmed. Moreover, the X-ray diffraction results of the electroless copper layers show that addition of SPS favors the formation of the preferred orientation on the (200) lattice plane.

     

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