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玻璃與金屬封接過程中氣孔率和玻璃飛濺

Porosity and glass sputtering in the sealing process of glass to metal

  • 摘要: 通過測量不同工藝條件下玻璃絕緣子中的氣孔率和最大氣泡直徑,以及觀察底盤表面的玻璃飛濺情況,研究了熔封氣氛、熔封溫度、熔封時間、氧化膜類型和厚度對玻璃絕緣子中氣孔率和玻璃飛濺的影響.結果表明,玻璃絕緣子中氣孔率與可伐合金底盤表面的飛濺程度有一定的關系.可伐合金表面Fe3O4氧化物與玻璃中SiO2發生化學反應是玻璃絕緣子中氣泡的一個重要來源,也是引起玻璃飛濺的因素.熔封氣氛和氧化膜厚度對氣孔率和玻璃飛濺影響最大.推薦的工藝條件是在可伐合金表面生成厚度約1μm的FeO氧化膜,然后與玻坯在950~980℃工廠條件的氣氛中熔封30~40 min.

     

    Abstract: The effects of sealing atmosphere,sealing temperature,sealing time,oxides' type and thickness on porosity and glass sputtering were investigated by measuring the porosity and the maximum diameter of gas bubbles in the glass insulator and observing the glass sputtering state on the surface of kovar alloy under various process conditions.It is indicated that there is a relationship between the porosity of the glass insulator and the glass sputtering grade on the surface of Kovar alloy.The chemical reaction between Fe3O4 on the surface of Kovar alloy and SiO2 in glass is an important source of porosity in the glass insulator,and it is also an influence factor of glass sputtering.Sealing atmosphere and oxides' thickness are the most important factors for porosity and glass sputtering.The recommended conditions are that FeO is formed on the surface of Kovar alloy and its thickness is about 1 μm,the sealing temperature is about from 950 to 980℃ and the sealing time is from 30 to 40 min in the real production atmosphere.

     

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