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可伐合金與玻璃封接工藝的優化

Process optimization for glass to Kovar sealing

  • 摘要: 研究了熔封氣氛、熔封溫度和熔封時間對玻璃與可伐合金封接件的外觀、氣密性、結合強度、彎曲次數和玻璃沿引線的爬坡高度的影響.結果表明:熔封氣氛的影響很大,隨著熔封氣氛氧化性的增強,玻璃飛濺程度越來越嚴重.隨著熔封時間的延長或者熔封溫度的升高,可伐合金表面為單一FeO或單一Fe3O4氧化膜時與玻璃的結合強度緩慢增加且彎曲次數基本保持不變,雙層氧化膜(FeO+Fe3O4或Fe3O4+Fe2O3)與玻璃的結合強度雖然較高,但彎曲次數卻明顯下降.可伐合金表面氧化膜類型與玻璃沿引線的爬坡高度關系不大,隨著熔封溫度的升高,玻璃沿引線的爬坡高度下降;而隨著熔封時間的延長,玻璃沿引線的爬坡高度急劇下降,當降至140μm后逐漸趨于穩定.推薦的優化工藝條件是:熔封氣氛為弱還原氣氛,熔封溫度在980℃左右,熔封時間為20~30 min.

     

    Abstract: The effects of sealing atmosphere, sealing temperature, and sealing time on the surface appearance, leakage rate, bonding strength, bending frequency, and height of glass along the pins were investigated for glass to Kovar sealing. The results indicated that sealing atmosphere had an important impact on the surface appearance, and the extent of glass spattering was more serious as increasing the oxidizability of sealing atmosphere. With the extending of sealing time or the increasing of sealing temperature, the bonding strength between single oxide film (single FeO or single Fe3O4) and glass gradually increased, and the bending frequency almost maintained. The bonding strength between hilayer oxide film (FeO + Fe3O4 or Fe3O4 + Fe2O3) and glass was relatively higher and increased more quickly, however the bending frequency sharply decreased. The height of glass along the pins was not related to the type of the oxide; it reduced gradually with increasing sealing temperature, and also decreased rapidly with increasing sealing time until 140μm. The recommended sealing conditions included that the sealing atmosphere was weak reductive gas, the sealing temperature was about 980℃ and the sealing time was between 20 and 30 min.

     

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