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激光超聲檢測共焦球面法布里-珀羅干涉儀

Design and fabrication of confocal fabry-perot interferometers used in laser-ultrasonic detection

  • 摘要: 從理論上對共焦球面法布里-珀羅干涉儀的自由光譜范圍、透射譜線半寬度、精細度、光譜分辨率等光學參數進行了分析,并根據激光超聲檢測的特點和要求,設計制作了一臺實驗室用的共焦球面法布里-珀羅干涉儀.利用單片機對該干涉儀的腔長和工作點進行控制,成功實現了激光超聲的非接觸測量.

     

    Abstract: The main optical parameters of Confocal Fabry-Perot Interferometers (CFPI), including free spectral range, minimum resolvable frequency difference (instrumental bandpass), finesse, spectral resolving power, were discussed. According to the requirement and feature of laser-ultrasonic detection, a CFPI used in laboratory was designed and fabricated. The CFPI's cavity length and operation point were controlled by a micro-single computer. Laser-ultrasonic non-contact detection is carried out successfully with the CFBI.

     

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