Abstract: A aerosol process is described for making nanometric Aluminum Nitride powder by pyrolysis of single compound Diethylaluminun Azide.The process can produce spherical A1N powder with mean particle diameter ranging from 10 to 50 nm at the temperature of furnace as lower as 500-700. The generated amorpous AIN powder is characterized by a BET surface area of 103m²/g and is very reactive toward moisture. A new way of preparing nanometric powder of AIN is found.