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共焦法布里-珀羅干涉儀靈敏度和穩定性研究

Methods to Improve the Sensitivity and Stability of CFPI for Surface Ultrasonic Vibration Detection

  • 摘要: 共焦法布里-珀羅干涉儀(Confocal Fabry-Perot Interferometer, CFPI)是用光學方法探測固體表面超聲振動的解調器件,它的靈敏度和穩定性決定了整個系統的靈敏度和穩定性.通過使用干涉儀的共軛輸出光,使系統探測超聲振動的靈敏度可提高至少2倍;同時詳細給出通過干涉環來粗調干涉儀的共焦點,并提出使用單片機(MCS-51)反饋控制系統來穩定最佳工作點的方法.利用該系統實現了對鋁樣品表面壓電超聲振動的檢測,得到了較好的實驗結果.

     

    Abstract: Confocal Fabry-Perot Interferometer (CFPI) is the demdulation device for surfce ultrasonic vibration detection. Its sensitivity and stability play very driportant roles in whole system. In this paper, a new detection system is introduced. By using both conjugate rays, the system sensitivity is doubled. Moreover, a single chip microcomputer (MCS-51) feedback control loop is applied to stabilize the working point at optimum position. The system has performed in detecting piezoelectric ultrasonic on surface of an aluminum sample.

     

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