大面積金剛石膜的均勻沉積

Uniformity of Large Area Diamond Films

摘要: 研究了大面積金剛石膜沉積過程中的均勻性問題和金剛石膜質量的均勻性問題.研究表明:用于生長金剛石膜的大面積磁旋轉等離子體電弧是均勻的,能使氣體混合均勻:金剛石膜在形核階段是均勻的;金剛石膜在生長階段是均勻的,有利于提高成膜幾率:沉積后的金剛石膜的質量是均勻的.大面積磁控長通道等離子矩能生長均勻的金剛石膜,可用于金剛石膜的研究和工業生產,

Abstract: The uniformity of large area diamond filrns in deposition process and quality of diamond films is researched. The results show tha the DC arc used for deposition of diamond films is uniform. Diaxnond films are uniform in the process of nucleation and the growh. The quslity of large area diamond films is uniform.