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巨磁電阻自旋閥多層膜的結構和磁性

Microstructure and Magnetic Properties of Spin Valve Multilayer with Giant Magnetoresistance

  • 摘要: 用磁控濺射鍍膜方法,制成了巨磁電阻自族間多層膜Ta/NiFe/Cu/NiFe/FeMn/Ta.它具有優良的特性.其室溫磁電阻比率MR>2%,自由層矯頑力Hc1<160A/m,自由層零磁場漂Hf<800A/m和釘扎層交換場Hex≈20×103 A/m.作為新型磁功能材料,它滿足高靈敏磁性傳感器和硬盤讀出頭的要求.對多層膜制備的方法也作了系統研究,并討論了緩沖層和釘扎層的制備工藝和微結構對磁性能的影響.

     

    Abstract: The spin valve multilayer, consisting of Ta/NiFe/Cu/NiFe/FeMn/Ta, with giant magnetoresistance(GMR) has been successfully produced by magnetron sputtering. It is Possessed of good properties. The magnetoresistance ratio MR>2% at room temperature, the coereivity of free layer Hcl< 160 A / m, shift field Hf < 800 A / m and the biasing exchange field Hex≈20·103 A / m. As a new magnetic functional malarial, these properties can meet the requirement for preparation of magnetic field sensors with high sensitivity, for example in magnetic recording magnetoresistance read head.

     

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