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DC PJ-CVD等離子體炬通道中的電弧行為

Arc Action in Passage of DC PJ-CVD Plasma Torch

  • 摘要: 運用電磁學和熱流體學的方法研究了直流大陽極噴嘴長電弧通道等離子體炬中電弧的行為,并通過實驗證明了溫度梯度與電場梯度作用于流體時所產生的特殊現象;結果表明:電弧弧柱的高溫效應劇烈排斥冷氣流的混入,使CVD過程受到抑制.新產生的膠體粒子在熱泳現象作用下逐漸沉積于通道內壁上.改變不同氣體的進氣位置以及減小溫度與電場梯度并增設徑向旋轉磁場,可有效地解決上述問題.

     

    Abstract: Arc action in plasma torch with large anode nozzle and long arc passage has been researched by means of electromagnetism and hot fluid mechanics.It has been showed that the special phenomenon will emerg when temperature gradient and electric field gradient act on fluid.The results indicate that high temperature effect of arc column strongly prevents cold gas current from getting in,so as to restrain CVD process.Newly emerging colloidal particles deposit progressively on passage wall under the action of heatphoresis.Above mentioned problems can be solved effectively by changing entrance positions of different gases,reducing gradients of temperature and electric field as well as adding radial circular magnetic field.

     

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