微波等離子體CVD金剛石薄膜的顯微結構

Microstructure of Diamond Thin Films by Microwave Plasma CVD

摘要: 用掃描電鏡(SEM)和透射電鏡(TEM)對6種微波等離子體CVD金剛石薄膜的表面形態和顯微結構進行了研究.結果表明:在金剛石晶粒長大過程中,(111)面方向長大時產生密度很高的微孿晶缺陷,而(100)面方向長大時產生的晶體缺陷較少.

Abstract: The morphology and the microstructure of six different dianond films deposited by microwave plasma CVD have been studied by SEM and TEM.The observations of microstructure indicate that high dencity microtwins are formed during the(111)planes growth and a few of crystal defects are formed during the(100) planes growth.