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Cz法晶體生長中的流動與傳熱

Heat Transfer and Fluid Flow during Crystal Growth of Cz Method

  • 摘要: 本文針對Cz法晶體生長特點,通過數值模擬的方法,對Cz法生長砷化鎵單晶時從引晶、放肩、等徑至收尾這一完整工藝過程中晶體的溫度場、熔體的溫度場和速度場進行了計算,從中分析籽晶和坩堝的轉向、轉速等因素對流動和傳熱的影響,并與實際的砷化鎵單晶生長過程進行比較,從比較結果看,二者基本吻合。

     

    Abstract: In this paper,the temperature distribution of crystal,the temperature and velocity distributions of melt are calculated numerically for GaAs crystal growth with emphasis on the whole growth process from seeding,shoulder,fixed diameter to derminator growth,and the factors which influence the fluid flow and heat transfer such as rotating direction and rotating rate of crystal and crucible etc.are analyzed. Experimental results are given to compare with the calculating results. and it is found that two of them are agreement.

     

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